Low frequency
output
Low frequency high voltage
power supply
Low frequency
output
Low frequency high voltage
power supply
Reaction
chamber
I.D 100mm×L160mm
Overview
Application
For additional models press here
High-frequency
Output
1,000W
V1000
1,000~2000W
1000XS
Stage size
250×170mm
PDC20
400×375mm
V1000XS
Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
High-precision matching unit and highly reliable RF generator
For additional models press here
High-frequency
Output
300W
PDC200
500W
PDC210/510
Stage size
250×170mm
PDC200/210
400×200mm
PDC510
Internal capcaity: 150L: DKG610/610V/650/650V
300L: DKG810/810V/850/850V
PDC Series
Small and compact, suitable for R&D purposes
Features
Applications
For additional models press here